Method of machining glass

ABSTRACT

A low cost, durable mask for use in structuring anodically bondable glass materials and other structurable glass materials.

BACKGROUND OF THE INVENTION

[0001] This application claims the benefit of U.S. ProvisionalApplication Serial No. 60/131,610, filed in the name of Amy V. Skrobison Apr. 29, 1999.

[0002] The present invention relates generally to etch masks formicrostructuring of glass materials and particularly, tophotolithographically created durable chromium-based laminate etch masksfor use in microstructuring anodically bondable glass materials or otherglass materials used in sensor fabrication, such as quartz and fusedsilica.

[0003] Silicon and various types of glass are widely used in microsensorand microactuator technologies because they are formable intomicrostructures, commonly referred to as being “microstructurable,” andbecause they provide other advantageous properties, including:electrical insulation, resistance to many chemicals, transparency atsome wavelengths, and joinability to many different metals. The mostsignificant requirements for materials used in the microsystemtechnologies are that the glass be microstructurable, preferably using astandard photolithography batch process; contain easily movable ions foranodic bonding; and have a thermal expansion coefficient essentiallymatching the thermal expansion coefficient of silicon to avoid thermalstresses at the interface. Thus, the preferred materials for use inmicrosystem technologies are both easy to structure using standardphotolithography batch process techniques and easy to anodically bond.Generally, however, the chemical composition of anodically bondableglass materials causes etching difficulties while easilymicrostructurable glass materials are generally difficult to bondbecause of thermal expansion coefficients which are not well matched tothe thermal expansion coefficient of silicon and/or the absence ofeasily movable positive sodium ions for anodic bonding. One anodicallybondable glass materials commonly used in microsensor and microactuatortechnology are borosilicate Pyrex™ 7740 glass available in wafers fromCorning Inc. of Corning, N.Y. Other glass materials that are easy tostructure using standard photolithography batch process techniques arecommonly used in sensor fabrication. Such materials include quartz andfused silica, for example, high purity fused silica Corning™ 7980 glasswafers, also available from Coming Inc., are used in the manufacture ofsome structured glass sensors.

[0004] One known method for structuring both anodically bondable glassmaterials and other structurable glass materials is electrochemicaldischarge drilling which includes, for example, chemical-assisted laseretching and focused ion beam enhanced etching. Other known drillingmethods use mechanical drills, ultrasonic drills, focused ion beamdrills, both eximer and carbon dioxide laser drills, andmicro-sandblasting. While these glass drilling methods obtain straightwalls, these methods provide neither the accuracy desired inMicrosystems nor the desired batch processing capabilities. Rather,these methods are generally incur relatively high costs, both in termsof the equipment required in the processing and the process cycle time.

[0005] Batch processing methods for microstructuring are necessary tothe practical use of both anodically bondable glass materials and otherstructurable glass materials used in sensor fabrication, such as quartzand fused silica. One common microstructuring batch process involvesmasking portions of the glass wafers and etching the desired detailsinto those portions of glass exposed by the mask. Photolithography iscommonly used to define a mask material resistant to the etchant. Thusphotolithography provides a process whereby mask details are accuratelyregistered on batch quantities of glass wafers. However, the knownmethods of photolithographically depositing mask materials are costlyand, in the case of polysilicon deposition, extreme cleanliness isrequired for high quality machining. A major limitation of currentlyavailable masking techniques is undercutting of the mask due to pooradhesion to the glass. The undercutting causes an expansion of the maskdetails within the glass wafer which leads to poor resolution of thedetails.

[0006] An article by Corman, Enoksson and Stemme entitled Deep WetEtching of Borosilicate Glass Using an Anodically Bonded SiliconSubstrate as Mask, published in the Journal of Micromaching andMicroengineering, Vol. 8 (1998) at pages 84-87 detailed a method of deepetching in borosilicate glass using an anodically bonded siliconsubstrate as a mask in a standard lithography technique. The method wasdeveloped using 500 micrometer thick borosilicate Pyrex™ 7740 glasswafers. The masking layer was a silicon wafer previously microstructuredin a potassium hydroxide (KOH) solution and anodically bonded to theglass wafer. The substrates were then submerged in a solution of 50%hydrofluoric (HF) acid mixed with water in a 1:5 concentration. Althoughthe method disclosed may be realizable using a standard lithographybatch process, the method results in an undesirable lateral undercutting1.5 times larger than the etch depth.

[0007] Another method for structuring both anodically bondable glassmaterials and other structurable glass materials uses a polysilicon filmdeposited by low pressure chemical vapor deposition or LPCVD on a 500micrometer thick Pyrex™ glass wafer as detailed in an article byGrétillat, Thlébaud, Koudelka-Hep and de Roolj entitled A NewFabrication Method of Borosilicate Glass Capillary Tubes With LateralInlets and Outlets, published in the Proceedings of Eurosensors (1996)at pages 259-62. This polysilicon film method is reportedly compatiblewith standard lithography techniques but, during the high temperatureLPCVD deposition process, the Na⁺ ions diffuse out of the glass andcontaminate the furnace. This contamination seriously degrades theelectrical characteristics of silicon so that the costly furnace is onlyusable thereafter for “unclean” applications. A similar method usingplasma enhanced chemical vapor deposition or PECVD silicon carbide as amask was reported by Flannery, Muurlos, Storment, Tsai, Tan, and Kovacsin an article entitled PECVD Silicon Carbide for MicromachinedTransducers, in the proceedings of Transducers '97 at pages 217-20.

[0008] Other known methods for structuring glass materials use etchmasks formed of chromium, gold and resist wherein the chromium layerimproves adhesion to the glass substrate. Although simple when comparedwith standard lithography techniques, these methods fail when applied toetch depths over about 50 micrometers because pin holes develop withprolonged exposure to the hydrofluoric acid etchant. Moreover, asubstantial lateral under etching of chromium occurs caused by a highetch rate at the glass-chromium interface. If the process is continued,this lateral undercutting results in complete separation of the maskfrom the glass wafer. While this lateral undercutting can be reduced byheating the glass substrate before and after the chromium maskdeposition to diffuse some of the chromium into the substrate, adhesionto the glass substrate remains poor and the mask exhibits poorresistance to the etchant. The poor adhesion and poor resistance to HFgenerally limits use of this type of mask to shallow etchings of 50micrometers or less.

[0009] Thus, a need exists for a process of microstructuring anodicallybondable glass materials and other structurable glass materialsrealizable in a low cost batch process and yielding accurately located,high resolution, high aspect ratio features.

SUMMARY OF THE INVENTION

[0010] The present invention overcomes the limitations of the prior artby providing low cost, durable masks for use in etching of anodicallybondable glass materials and other structurable glass materials. Themasks of the present invention are formed by first depositing aprotective layer onto a surface of the glass substrate blank, thenforming the desired mask details in the protective layer and hard-bakingthe resulting structure. According to one aspect of the invention, theprotective layer is formed of a first adhesion layer, preferablychromium metal, deposited on the cleaned surfaces of the glasssubstrate. The chromium layer is deposited thickly enough to endureexposure to a glass etchant solution during subsequent etching of theglass substrate. Alternatively, a second protective metallic layer isdeposited over the underlying chromium layer using, for example, gold,platinum, copper, and nickel or another suitable material.

[0011] According to another aspect of the invention, the desired maskdetails are formed in the protective layer by lithographically definingthe mask details and etching the exposed portions of the protectivelayer. The mask details are preferably defined using conventionalphotolithography techniques wherein a layer of photoresist laminate isapplied over the protective layer and the desired details are defined inthe resist by exposing and developing the material. In a preferredembodiment of the invention, the photoresist laminate coat is a negativeresist laminate applied using a heated roll-bonding process.

[0012] According to another aspect of the invention, the hard-baking ofthe protective layer is performed by exposing the resulting structure toa predetermined elevated temperature in the approximate range of 140°C.+/−2° C. for a predetermined time period in the approximate range of1+/−0.25 hours.

[0013] According to other aspects of the present invention, a method isprovided for structuring glasses, particularly anodically bondablesubstrate materials and other glass substrate materials such as fusedsilica, quartz, or another structurable glass substrate material. Themethod of the invention includes cleaning the glass substrate blank,depositing a protective metallic adhesion layer onto the surfaces of anglass substrate and defining the desired mask details on the protectivelayer, the mask details are formed in the protective layer and the wholeis hard-baked to complete the mask. The structurable glass substrate isetched in those areas exposed by the mask details. Then, the etchedsubstrate is rinsed and dried and the photoresist is stripped.

[0014] According to one aspect of the invention, the mask details areformed in the protective layer by photolithographically defining themask details in a layer of negative photoresist laminate

[0015] According to one aspect of the invention, the protective metallicadhesion layer is formed either of a relatively thick layer of chromiumor of a relatively thin layer of chromium in combination with a secondlayer formed of some material that is resistant to buffered oxideetchant (BOE) solutions effective for etching the glass substratematerial. The second layer of the protective layer is a metal selectedfrom any metal that is resistant to BOE solutions, including gold,platinum, copper, nickel and any other suitable metal or metal alloy.The glass substrate blank, including the protective layer, is baked at apredetermined elevated temperature in the approximate range of 140°C.+/−2° C. for a predetermined time period in the approximate range of1+/−0.25 hours.

[0016] According to another aspect of the invention, the glass substrateblank with the protective layer adhered thereto is exposed to a BOEsolution heated to a temperature in the approximate range of 60° C. to70° C.

BRIEF DESCRIPTION OF THE DRAWINGS

[0017]FIG. 1 illustrates a flow chart of the process of the presentinvention; and

[0018]FIG. 2 illustrates a flow chart of one preferred embodiment of theprocess of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0019]FIG. 1 shows a flow chart of the process for manufacturing the lowcost, durable masks of the present invention. According to the processoutlined in FIG. 1, one or more metal layers are deposited onto one ormore structurable glass substrates. This metalization layer serves as anadhesion layer for a negative photoresist laminate, which is preferablyapplied using a conventional heated roll-bond laminator. The maskdetails are photolithographically defined on the substrate, theunderlying metal layers are etched and the substrate is then hard-baked.The resulting laminated substrate can be etched to depths well in excessof 700 micrometer and for periods of time over 24 hours in bufferedoxide etchants (BOE).

[0020] In Block 2 of FIG. 1, a layer of chromium (Cr) is applied to astructurable glass substrate to provide an adhesion layer for anyadditional masking layers. This chromium layer is applied to thesubstrate using any available metal deposition technique, for example,conventional thermal evaporation, sputtering, or another suitable metaldeposition technique. The structurable glass substrate is preferablyformed of fused silica, quartz, borosilicate or another suitablestructurable glass substrate material. The Cr layer both forms anadhesion layer for a later photoresist layer or for an optional secondmetalization layer and protects portions of the substrate during asubsequent etching process. In Block 4, an optional second metalizationlayer is applied over the Cr layer using any available metal depositiontechnique. This optional second metalization layer is preferably formedof a material and having a thickness suitable to avoid the time-basedpin-hole effects known to occur in thin layers of Cr. Unless this secondmetalization layer is applied, the Cr layer is preferably appliedthickly, relative to an embodiment including the optional additionalmetalization layers, to avoid these time-based pin-hole effects whichlimit the etch depth possible in the prior art. If the invention ispracticed using only a Cr metalization layer, the Cr is preferablydeposited having sufficient thickness to allow etching of the substrateto the desired depth without developing detrimental pin-holes. In Block6, a layer of photoresist, preferably negative photoresist, is appliedover the metalization layer or layers by performing a conventionalheated roll-bond. The photoresist is exposed and developed in Block 8,whereby the mask details are defined. In Block 10, the one or moremetalization layers are separately etched: any secondary metalizationlayer is etched first followed by etching of the underlying Crmetalization layer, whereby the mask details are defined in the one ormore metalization layers. In Block 12, the portions of the photoresistand metalization layers remaining after the etching of Block 10 are hardbaked to complete the mask. Those of ordinary skill in the art willappreciate that the optional secondary metalization layer is formed ofany material that is resistant to HF etchant solutions, such as BOE.Accordingly, the optional secondary metalization layer is formed of anysuitable material, including but not limited to any of gold, platinum,copper, nickel, or another suitable material.

[0021]FIG. 2 shows a flow chart of one preferred embodiment of thepresent invention. In FIG. 2 at Block 20, a thin layer of chromium (Cr)on the order of 100 Å (Angstroms) is first applied to a glass substratesuch as fused silica, quartz substrates, borosilicate or anotherstructurable glass material preferably using a conventional thermalevaporation or sputtering technique. In this preferred embodiment, theCr metalization layer provides an adhesion layer for an additionalmetalization layer. At Block 22, a second metalization layer of gold(Au) is applied over the Cr layer, preferably using thermal evaporationor sputtering. The Au metalization layer interlocks to the Cr layer andis preferably deposited having a thickness sufficient to protect the Crlayer from developing undesirable pin-holes during etching of the glasssubstrate. For example, a Cr metalization layer of about 100 Å thick isprotected by a Au metalization layer about 2500 Å thick for etching a760 micrometer thick glass substrate through its thickness. Thismetalization layer also serves as an adhesion layer for a photoresistlaminate. At Block 24, a layer of photoresist, preferably negativephotoresist, is applied over the Au metalization layer by performing aheated roll-bond technique. The photoresist is a material that isresistant to metal etchants effective for removing the underlyingmetalization layers applied in Block 20 and Block 22. The photoresist isthen exposed and developed to provide the mask details, at Block 26. AtBlock 28, the Au and Cr metalization layers are separately etched: theAu metalization layer is etched first followed by etching of theunderlying Cr metalization layer. The portions of the Au metalizationlayer exposed by the process of Block 26 are first etched to form themask details in the Au and expose corresponding portions of the Crmetalization layer, then the portions of the underlying Cr metalizationlayer are etched to expose corresponding portions of the glasssubstrate. At Block 30, the layers of photoresist, Au and Cr that remainafter exposure and development described in Block 26 and the etchingdescribed in Block 28 are hard baked to complete creation of the mask.As noted above, the Au metalization layer is alternatively replaced byother suitable metals that are resistant to HF etch solutions, such asBOE. Or, according to another alternative embodiment, the Aumetalization layer is eliminated and replaced by a thickerself-protecting layer of Cr. A self-protecting Cr metalization layer ispreferably about 2500 Å+/−500 Å thick for etching the 760 micrometerthick glass substrate through its thickness.

[0022] The following describes an exemplary application of the method ofthe above identified invention. A batch quantity of 0.030 inch (760micrometer) thick fused silica substrate blanks are cleaned. Oneeffective cleaning method includes exposure to a peroxide/sulfuric acidsolution, commonly known in the art as a “Piranha clean,” followed by aspin-rinse-dry cycle at about 300 RPM for about 5 minutes, then about a6 second dip in a 10:3 solution of HF and acetic acid followed by asecond spin-rinse-dry cycle at about 300 RPM for about 5 minutes and aplasma clean using a conventional plasma cleaner. A Cr layer about 100Å+/−50 Å thick is evaporated onto each cleaned substrate blank followedby a Au layer about 2500 Å+/−250 Å thick.

[0023] A dry film photoresist laminate of a type commonly used inprinted circuit board manufacture is applied to 0.030 inch thick fusedsilica substrate blanks using a conventional heated roll-bonder at arelatively low pressure. The laminator pressure is preferably about 20pounds per square inch; the laminator roll temperature is preferablyabout 234° F.+/−5° F.; and the laminator feed rate is preferably about 2feet/minute. The dry film laminate is then exposed for a predeterminedperiod of time. For example, according to the present embodiment, thedry film laminate is exposed using a broad spectrum Hg-UV source forabout 8 seconds. The exposed laminate is developed, for example, forabout 5 minutes+/−15 seconds in an agitated 1% by weight Na₂ CO₃solution at room ambient temperature. After the laminate is patterned,the Au metalization layer is etched using, for example, a KI/I₂ solutionfor about 2 minutes+/−15 seconds at room ambient temperature. The Aumetalization etch is followed by a Cr etch using, for example, a K₂ Cr₂O₇/HNO₃ solution for about 1 minute+/−15 seconds also at room ambienttemperature. The laminated substrate blanks are then hard-baked. Forexample, the laminated substrate blanks are baked for about 1hour+/−0.01 hour at a temperature of about 140° C.+/−2° C. The laminatedand hard-baked substrate blanks are etched in a heated HF etchantsolution, for example, a 10:1 BOE solution heated to about 60-70° C.Different concentrations of BOE, i.e., different NH₄F:HF solutions, arealso effective in practicing the invention to etch a desired geometryinto the laminated and hard-baked substrate blanks. In operation, theresultant hard-baked etch mask protects the unexposed substrate portionsfrom the etchant for extended periods, effectively resisting theundercutting along the chromium-substrate interface typical ofchromium-gold masks as taught by the prior art. In the foregoingexemplary application, the method of the above identified inventionprovides low cost, durable masks formable in batch processing usingstandard photolithography techniques for accurately microstructuringanodically bondable glass materials and other structurable glassmaterials such as quartz and fused silica, whereby features are etchedin through the entire thickness of 700+ micrometer thick substrateblanks with little undesirable undercutting of the etch masks. In thisexample, undesirable lateral etching is on the order of only 25micrometers per side through the entire 700+ micrometer thickness.Following the hot HF etching process, the structured substrates arerinsed and dried and the photoresist is stripped in a heated alkali orcaustic solution.

[0024] Those of ordinary skill in the relevant art recognize that thepresent invention is not limited to the mask forming method describedabove and shown in the FIGURES. For example, the relative concentrationsof NH₄F and HF in the heated BOE solution may vary while remainingeffective for the practice of the present invention. Similarly, therelative thicknesses of Cr and Au, or another suitable secondmetalization layer may vary without limiting the effective practice ofthe invention. In another example, the method may incorporate differentphotoresist materials than those discussed and different processes forapplying and processing them. However, the above described process usescommonly available equipment and has been shown to be effective inproduction situations.

[0025] Although the foregoing invention has been described in detail forpurposes of clarity, it will be obvious to those of ordinary skill inthe relevant art that certain modifications may be practiced within thescope of the appended claims. For example, although the presentinvention is particularly useful for microstructuring microsensors andmicroactuators, it may also be used for microstructuring glass materialsgenerally.

I claim:
 1. A method for manufacturing etch masks useful in structuringglass substrates, the method comprising: depositing an adhesion layeronto a surface of the glass substrate, defining predetermined maskdetails in a layer of photoresist material applied over said adhesionlayer; forming said predetermined mask details into said adhesion layer;and baking said adhesion and said photoresist material layers.
 2. Themethod recited in claim 1, wherein said depositing an adhesion layercomprises depositing a layer of chromium.
 3. The method recited in claim2, wherein: said layer of metal defines a first metalization layer; andsaid depositing an adhesion layer further comprises depositing at leasta second metalization layer over said first metalization layer.
 4. Themethod recited in claim 3, wherein said second metalization layercomprises a metal that is resistant to buffered oxide etchant (BOE)solutions.
 5. The method recited in claim 4, wherein said secondmaterial layer is formed of a metal different from said firstmetalization layer material.
 6. The method recited in claim 3, whereinsaid second metalization layer comprises a metal selected from the groupconsisting of gold, platinum, copper, and nickel.
 7. The method recitedin claim 1, wherein said defining further comprisesphotolithographically defining said predetermined mask details.
 8. Themethod recited in claim 7, wherein said forming further comprisesetching portions of said adhesion layer exposed by said lithographicallydefining of said predetermined mask details.
 9. The method recited inclaim 8, wherein said layer of photoresist material is applied over saidadhesion layer using a heated roll-bonding process.
 10. The methodrecited in claim 9, wherein said layer of photoresist material is alayer of negative resist laminate.
 11. The method recited in claim 1,wherein said baking further comprises exposing said adhesion and saidphotoresist material layers to a predetermined elevated temperature fora predetermined time period.
 12. The method recited in claim 11, whereinsaid exposing further comprises exposing said adhesion and saidphotoresist material layers to a temperature in the approximate range of138° C. to 142° C. for a time period in the approximate range of 0.75 to1.25 hours.
 13. A method for manufacturing etch masks useful instructuring glass materials, the method comprising: depositing ametallic adhesion layer onto opposing surfaces of a glass substrate;coating the exposed surfaces of said one or more metallic adhesionlayers distal from the surfaces of the glass substrate with a layer ofphotoresist laminate material; lithographically defining predeterminedmask details in said layer of photoresist laminate material; etchingsaid mask details through the thickness of each of said one or moremetallic adhesion layers, whereby predetermined portions of the surfacesof the glass substrate are exposed; and hard-baking the resulting maskstructure.
 14. The method recited in claim 13, wherein said metallicadhesion layer comprises a layer of chromium sufficiently thick toeffectively protect the glass substrate during a subsequent structuringprocess.
 15. The method recited in claim 13, wherein said metallicadhesion layer comprises: a first relatively thin layer of chromiumdeposited onto opposing surfaces of an glass substrate; and a secondrelatively thick metalization layer deposited over said layer ofchromium, said second metalization layer comprising a metal resistant tobuffered oxide etchant (BOE) solutions.
 16. The method recited in claim15, wherein said second metalization layer comprises a metal selectedfrom the group consisting of gold, platinum, copper, and nickel.
 17. Themethod recited in claim 13, wherein said lithographically defining ofsaid predetermined mask details comprises photolithographically definingof said predetermined mask details.
 18. The method recited in claim 13,wherein said baking further comprises exposing said resulting maskstructure to a predetermined elevated temperature for a predeterminedtime period.
 19. The method recited in claim 13, wherein saidhard-baking further comprises exposing said resulting mask structure toa temperature in the approximate range of 140° C.+/−2° C. for a timeperiod in the approximate range of 1+/−¼ hours.
 20. A method forstructuring glass materials, the method comprising: depositing aprotective metallic layer onto one or more surfaces of a glasssubstrate; defining predetermined mask details on said protective layer;forming said mask details in said protective layer; hard baking saidprotective layer; and etching portions of said substrate exposed by saidmask details.
 21. The method recited in claim 20, further comprising acleaning of said one or more surfaces of a glass substrate prior to saiddepositing of said protective metallic layer.
 22. The method recited inclaim 20, wherein said depositing comprises depositing a layer ofchromium.
 23. The method recited in claim 22, wherein said depositingfurther comprises depositing at least a second material layer over saidfirst metalization layer, said second material layer comprising amaterial that is resistant to etchant solutions effective for etchingsaid glass substrate.
 24. The method recited in claim 23, wherein saidsecond material layer comprises a material different from said firstmetalization layer material.
 25. The method recited in claim 22, whereinsaid depositing comprises depositing at least a second metalizationlayer that is resistant to buffered oxide etchant (BOE) solutions. 26.The method recited in claim 25, wherein said second metalization layercomprises a metal selected from the group consisting of gold, platinum,copper, and nickel.
 27. The method recited in claim 20, wherein: saiddefining further comprises photolithographically defining said maskdetails; and said forming further comprises etching said mask details insaid protective layer.
 28. The method recited in claim 27, wherein saidphotolithographically defining said mask details further comprises.applying a layer of photoresist laminate over said protective layer;exposing a predetermined portion of said layer of resist laminate; anddeveloping said exposed portion of said layer of resist laminate. 29.The method recited in claim 28, wherein said applying a layer of resistlaminate further comprises applying a layer of negative photoresistlaminate.
 30. The method recited in claim 20, wherein said bakingfurther comprises exposing at least said mask details of said protectivelayer to a predetermined elevated temperature for a predetermined timeperiod.
 31. The method recited in claim 30, wherein said exposingfurther comprises exposing said mask details of said protective layerportions to a temperature in the approximate range of 138° C. to 142° C.for a time period in the approximate range of 0.75 to 1.25 hours. 32.The method recited in claim 20, wherein said etching portions of saidsubstrate further comprises exposing said portions to a predeterminedbuffered oxide etchant (BOE) solution heated to a predeterminedtemperature.
 33. The method recited in claim 32, wherein saidpredetermined temperature is a temperature in the approximate range of60° C. to 70° C.
 34. A method for structuring microstructurable glassmaterials, the method comprising: depositing a metallic adhesion layeronto each opposing surface of a microstructurable glass substrate;adhering a layer of photoresist laminate material onto each surface ofsaid metallic adhesion layers distal from the surfaces of saidsubstrate; lithographically defining predetermined mask details in saidlayer of photoresist laminate material; forming said mask details insaid metallic adhesion layer, whereby a detailed metallic mask isformed; hard-baking said detailed metallic mask; and etching portions ofsaid substrate exposed by said detailed metallic mask.
 35. The methodrecited in claim 34, further comprising cleaning said substrate prior tosaid depositing of said metallic adhesion layer.
 36. The method recitedin claim 34, wherein said depositing comprises depositing a layer ofchromium
 37. The method recited in claim 36, wherein said depositingfurther comprises: depositing a first metallic layer onto each opposingsurface of a microstructurable glass substrate; and depositing at leasta second metallic layer over said first metallic layer, said secondmetallic layer comprising a metal different from said first metalliclayer material.
 38. The method recited in claim 37, wherein said secondmetallic layer is formed of a material that is resistant to bufferedoxide etchant (BOE) solutions.
 39. The method recited in claim 37,wherein said second metallic layer comprises a metal selected from thegroup consisting of gold, platinum, copper, and nickel.
 40. The methodrecited in claim 34, wherein said forming further comprises etching saidmask details in said metallic adhesion layer.
 41. The method recited inclaim 35, wherein said lithographically defining said mask detailsfurther comprises: applying a layer of photoresist laminate over saidmetallic adhesion layer; exposing a predetermined portion of said layerof photoresist laminate; and developing said exposed portion of saidlayer of photoresist laminate.
 42. The method recited in claim 41,wherein said applying a layer of photoresist laminate further comprisesapplying a layer of negative photoresist laminate.
 43. The methodrecited in claim 34, wherein said hard-baking further comprises bakingsaid microstructurable glass substrate, including said metallic adhesionand said photoresist laminate material layers, at a predeterminedelevated temperature for a predetermined time period.
 44. The methodrecited in claim 30, wherein said baking further comprises baking at atemperature in the approximate range of 140° C.+/−2° C. for a timeperiod in the approximate range of 1 hour+/−¼ hours.
 45. The methodrecited in claim 34, wherein said etching portions of said substratefurther comprises exposing said microstructurable glass substrate,including said metallic adhesion and said photoresist laminate materiallayers, to a predetermined buffered oxide etchant (BOE) solution heatedto a predetermined temperature.
 46. The method recited in claim 45,wherein said predetermined temperature is a temperature in theapproximate range of 60° C. to 70° C.
 47. The method recited in claim34, further comprising stripping said layer of photoresist laminatematerial.
 48. An etch mask useful in structuring glass substrates, themask comprising: a protective layer deposited onto a surface of theglass substrate; predetermined mask details formed in said protectivelayer; and said protective layer heated to a predetermined elevatedtemperature for a predetermined time period.
 49. The mask recited inclaim 48, wherein said protective layer further comprises at least afirst metalization layer.
 50. The method recited in claim 49, whereinsaid first metalization layer comprises a layer of chromium.
 51. Themask recited in claim 50, wherein said protective layer furthercomprises at least a second metalization layer deposited over said firstmetalization layer, said second metalization layer formed of a metalthat is resistant to buffered oxide etchant (BOE) solutions.
 52. Themask recited in claim 51, wherein said second protective layer comprisesa second metalization layer formed of a material different from that ofsaid first metalization layer.
 53. The mask recited in claim 52, whereinsaid second metalization layer comprises a metal selected from the groupconsisting of gold, platinum, copper, and nickel.